[1]吴冲若.磁控管内残余气体总压力的量测[J].东南大学学报(自然科学版),1979,9(3):34-42.[doi:10.3969/j.issn.1001-0505.1979.03.003]
 Nanjing Institute of Technology,Speciality,77 Factory,et al.Measurement of Total Pressure of Residual Gases in Magnetrons[J].Journal of Southeast University (Natural Science Edition),1979,9(3):34-42.[doi:10.3969/j.issn.1001-0505.1979.03.003]
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磁控管内残余气体总压力的量测()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
9
期数:
1979年第3期
页码:
34-42
栏目:
本刊信息
出版日期:
1979-09-20

文章信息/Info

Title:
Measurement of Total Pressure of Residual Gases in Magnetrons
作者:
吴冲若
南京工学院六一专业工艺组; 七七二厂八车间技术组
Author(s):
Nanjing Institute of Technology 61 Speciality; 772 Factory Eighth Wookshop Wu Chong-Ruo
关键词:
磁控管 总压力 二次电子 测量下限 残余气体 汤生放电 灵敏度 自持放电 工作电压 冷阴极
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1979.03.003
摘要:
本文讨论了磁控管内冷阴极放电特性,提出了利用自持汤生放电的原理来测量磁控管内残余气体的总压力。对几种管型磁控管在校正系统上进行了试验,研究了不同工作状态下的放电特性,确定了最佳工作电压。磁控管内总压力的可测范围为10^{-2}~10^{-7}托,灵敏度为1A/托,并具有较好的线性和重复性。文中也提出了扩展测量下限的一些设想。
Abstract:
The cold cathode discharge characterisic in magnetrons is discussed. A method that uses the principle of self-sustained Townsend discharge to measure the total pressure of residual gases in magnetrons has been tested with correctional system. The discharge characteristics under different operating conditions are studied, and the optimum operating voltage is determined. This method is suitable for magnetrons in pressure range 10^{-2}~10^{-7} torr with a sensitivity of about 1 amp/torr. The linearity and reproducibility of readings are satisfactory. Some thoughts for extending the lower measurable limit are also presented in this paper.
更新日期/Last Update: 2013-05-01