[1]姜佐银,娄维鸿,邵力为,等.软X射线出现电势谱在电真空工艺应用中的探讨[J].东南大学学报(自然科学版),1982,12(1):125-132.[doi:10.3969/j.issn.1001-0505.1982.01.013]
 Jiang Zhuo-ying,Lou Wei-hong,Shao Li-wei Liu Nan-chang,et al.The Soft X-Ray Appearance Potential Spectrometer Applied in Electro-Vacuum Technology[J].Journal of Southeast University (Natural Science Edition),1982,12(1):125-132.[doi:10.3969/j.issn.1001-0505.1982.01.013]
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软X射线出现电势谱在电真空工艺应用中的探讨()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
12
期数:
1982年第1期
页码:
125-132
栏目:
本刊信息
出版日期:
1982-03-20

文章信息/Info

Title:
The Soft X-Ray Appearance Potential Spectrometer Applied in Electro-Vacuum Technology
作者:
姜佐银娄维鸿邵力为刘南昌刘洁美
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Author(s):
Jiang Zhuo-ying Lou Wei-hong Shao Li-wei Liu Nan-chang Liu Jie-mei
关键词:
可伐合金 出现电势谱 射线 工艺应用 电真空器件 俄歇电子能谱 氢处理 工艺质量 电子轰击 电真空材料
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1982.01.013
摘要:
本文介绍了自制的封闭式软X射线出现电势谱仪,并将该谱仪用于电真空材料与工艺过程的分析。通过对4J-29可伐合金不同工艺处理后所测得的软X射线出现电势谱(SXAPS)进行分析对比,找到了利用软X射线出现电势谱作为监控可伐合金脱碳工艺质量的途径。此外,也运用俄歇电子能谱(AES)和X射线光电子谱(XPS)对可伐合金进行了同样的分析,进一步证实了所得到的结论。
Abstract:
In this paper, the home-made soft X-ray appearance potential spectrometer with a sealed-off analytical tube is introduced and in the meterials and technical analysis of electro-vacuum technology this spectrometer is applied. We have discussed the spectrums of 4J-29 Kovar alloy in different technical process and found that the soft X-ray appearance potential spectrometer can be used to detect the process in which the carbon is released on kovar alloy surface. In addition, we have also taken same analysis with Auger electron spectroscopy and X-ray photoelectron spectroscopy and further prove that this result is correct.
更新日期/Last Update: 2013-05-01