[1]刘光廷,许健,简耀光.MIS结构AES分析及电流输运对表面和界面依赖关系的研究[J].东南大学学报(自然科学版),1983,13(4):86-90.[doi:10.3969/j.issn.1001-0505.1983.04.008]
 Liu Guang-ting,Xu Jian. and Jian Yao-guang.AES Analysis of MIS structure and Studies of the Dependence of MIS Current Transport on the Surface and Interface Conditions[J].Journal of Southeast University (Natural Science Edition),1983,13(4):86-90.[doi:10.3969/j.issn.1001-0505.1983.04.008]
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MIS结构AES分析及电流输运对表面和界面依赖关系的研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
13
期数:
1983年第4期
页码:
86-90
栏目:
本刊信息
出版日期:
1983-12-20

文章信息/Info

Title:
AES Analysis of MIS structure and Studies of the Dependence of MIS Current Transport on the Surface and Interface Conditions
作者:
刘光廷许健简耀光
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Author(s):
Liu Guang-ting Xu Jian. and Jian Yao-guang
关键词:
电流输运 依赖关系 俄歇电子能谱分析 电学参数 介质层 纵向结构 超薄铝膜 太阳电池 全面积 界面态密度
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1983.04.008
摘要:
借助于俄歇电子能谱分析,结合氩离子溅射剥蚀,对全面积超薄铝膜的AI/S_iO_x/S_iMIS结构太阳电池的纵向组份分布进行了研究。结果表明,实际的纵向结构为AI/AI_2O_3(+S_i)/S_i。定性地分析了MIS结构中的电流输运对界面和表面的依赖关系从而解释了器件宏观电学参数的稳定性。
Abstract:
In this paper, the vertical composition profiles of the Al/SiO_2/Si MIS solar cells with all-ultrathin Aluminum film are investigated by means of the Anger electron spectroscope and simultaueously with the technique of Argonion sputter etching. Experimental resurts show that the vertical structure of MIS solar cell is Al/Al_2O_3 (+Si)/Si. We made a quanlitative analyses about the dependence of MIS current transport on the surface and interface conditions and an expeanation of the stability of macroscopic electrical parameters of the deuice are given.

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[1]谢虹.化学反应理论中的一类半线性边值问题的多参数研究[J].东南大学学报(自然科学版),1985,15(3):89.[doi:10.3969/j.issn.1001-0505.1985.03.011]
 Xie Hong.A Multi Parameter Study of a Semilinear Boundary Value Problem Arising from Chemical Reactor Theory[J].Journal of Southeast University (Natural Science Edition),1985,15(4):89.[doi:10.3969/j.issn.1001-0505.1985.03.011]

更新日期/Last Update: 2013-05-01