[1]戴靖东.超大规模集成电路微细加工精密工作台系统的动态响应[J].东南大学学报(自然科学版),1987,17(1):96-105.[doi:10.3969/j.issn.1001-0505.1987.01.012]
 Dai Jingdong.Dynamic Response of an Accurate Positioning X-Y Stage System for Microfabrication in VLSI[J].Journal of Southeast University (Natural Science Edition),1987,17(1):96-105.[doi:10.3969/j.issn.1001-0505.1987.01.012]
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超大规模集成电路微细加工精密工作台系统的动态响应()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
17
期数:
1987年第1期
页码:
96-105
栏目:
本刊信息
出版日期:
1987-01-20

文章信息/Info

Title:
Dynamic Response of an Accurate Positioning X-Y Stage System for Microfabrication in VLSI
作者:
戴靖东
南京工学院机械工程系
Author(s):
Dai Jingdong
Department of Mechanical Engineering
关键词:
微细加工 精密工作台 动态运动规律
Keywords:
microfabrication accurate positioning stage dynamic motion rule
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1987.01.012
摘要:
本文根据大规模和超大规模集成电路微细加工精密工作台的质量和刚度的实际分布情况,提出了一个多自由度系统的动力学模型,利用状态空间法求此精密工作台系统的动态运动规律,并借助电子计算机对其精确求解。
Abstract:
In conformity with a practical distrubition of the mass and stiffness of an accurate positioning X-Y stage for the mierofabrieation in VLSI, the paper offers a dynamic model of a system with multi-dimension of freedom and uses the state space method to find the motion rule of an accurate positioning X-Y stage system and to seek the accurate solution with the help of a computer.

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[2]黄家贤,叶琪根,朱逢时.精密工作台空气静压导轨静刚度参数的试验研究[J].东南大学学报(自然科学版),1983,13(4):31.[doi:10.3969/j.issn.1001-0505.1983.04.003]
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更新日期/Last Update: 2013-04-30