[1]邵力为,刘洁美,娄维鸿,等.共振光电子及俄歇电子出电势谱复合分析管的研制和应用[J].东南大学学报(自然科学版),1987,17(1):137-141.[doi:10.3969/j.issn.1001-0505.1987.01.016]
 Shao Liwei,Liu Jeimei,Lou Weihong,et al.The Research and Application of the Compound Tube for Resonant Photoelectron and Auger Electron Appearance Potential Spectroscopy[J].Journal of Southeast University (Natural Science Edition),1987,17(1):137-141.[doi:10.3969/j.issn.1001-0505.1987.01.016]
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共振光电子及俄歇电子出电势谱复合分析管的研制和应用()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
17
期数:
1987年第1期
页码:
137-141
栏目:
本刊信息
出版日期:
1987-01-20

文章信息/Info

Title:
The Research and Application of the Compound Tube for Resonant Photoelectron and Auger Electron Appearance Potential Spectroscopy
作者:
邵力为刘洁美娄维鸿陈德森
南京工学院电子研究所
Author(s):
Shao Liwei Liu Jeimei Lou Weihong Chen Desen
Research Institute of Electronics
关键词:
appearance potential spectroscopy surface analysis Auger electron.
Keywords:
appearance potential spectroscopy surface analysis Auger electron
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1987.01.016
摘要:
<正> 一、引言共振光电子出现电势谱(RPAPS)的主要特点是对杂质元素的分辨率均优于同样条件下的软x射线出现电势谱(SXAPS)并与二次离子谱仪(SIMS)相妣美,因此它是一种对表面杂质分析相当灵敏的有用的出现电势谱。俄歇电子出现电势谱是芯能级谱中灵敏度最离的一种出现电势谱,而三极式结构的俄歇电子出现电势谱又最适于各种场合和各种类型材料的分析,
Abstract:
General principle and application in resonant photoelectron appearance potential spectroscopy and Auger electron appearance potential spectroscopy are introduced. The compound of RPAPS and AEAPS is considered according to the aim of application. Two general structures of compound tube for several meterial analysis are introduced and the analysis result of stain-less steel and evaporatable getter meterial indicates that the compound tube has an applicable value for special purpose and special research of chemical activator, easy to stain and easy to evaporate meterials.

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[1]邵力为,刘洁美,胡嗣安,等.掺氮吸气剂的俄歇能谱分析[J].东南大学学报(自然科学版),1990,20(3):98.[doi:10.3969/j.issn.1001-0505.1990.03.016]
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[2]吴敬文,陈浩,丁德胜,等.扫描隧道谱研究半导体硅掺杂[J].东南大学学报(自然科学版),1995,25(6):154.[doi:10.3969/j.issn.1001-0505.1995.06.029]
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更新日期/Last Update: 2013-04-30