[1]唐政清,丁力.二极射频辉光放电获取表面信息的机理与特性研究[J].东南大学学报(自然科学版),1989,19(2):36-42.[doi:10.3969/j.issn.1001-0505.1989.02.006]
 Tang Zhengqing Ding Li (Departement of Electronic Engineering).Investigation on Getting Messages from Surface by Means of RF Diode Glow Discharge[J].Journal of Southeast University (Natural Science Edition),1989,19(2):36-42.[doi:10.3969/j.issn.1001-0505.1989.02.006]
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二极射频辉光放电获取表面信息的机理与特性研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
19
期数:
1989年第2期
页码:
36-42
栏目:
本刊信息
出版日期:
1989-03-20

文章信息/Info

Title:
Investigation on Getting Messages from Surface by Means of RF Diode Glow Discharge
作者:
唐政清丁力
东南大学电子工程系; 东南大学电子工程系
Author(s):
Tang Zhengqing Ding Li (Departement of Electronic Engineering)
关键词:
质谱 离子源 辉光放电 等离子体探针诊断
Keywords:
mass spectra ion sources glow dischange plasma diagnostics
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1989.02.006
摘要:
本文对射频辉光放电离子源用后电离方式产生中性粒子信号的机理进行了研究。介绍了放电等离子体的探针诊断与引出离子流的能量分析实验。得出了离子能量分布的中心在20~25eV适于用四极质谱分析的结论。
Abstract:
This paper studies the mechanism of generating the sputtered neutral signal by using post ionization process in RF glow discharge ion source. The experiment on probe detection of discharge plasma and the energy analysis of extracted ions are diseribed. It is identified that the energy distribution centre is about 20-25 eV and suits the quadrupole mass analysis.

相似文献/References:

[1]毛福明.四极质谱计的高效离子源[J].东南大学学报(自然科学版),1981,11(2):27.[doi:10.3969/j.issn.1001-0505.1981.02.003]
 Mao Fu-ming.High-Efficiency Ion Source Used in Quadrupole Mass Spectrometer[J].Journal of Southeast University (Natural Science Edition),1981,11(2):27.[doi:10.3969/j.issn.1001-0505.1981.02.003]

更新日期/Last Update: 2013-04-30