[1]周顺,张燕娥,蔡体菁,等.改进型振动轮式硅微机械陀螺仪的研究[J].东南大学学报(自然科学版),1999,29(4):30-33.[doi:10.3969/j.issn.1001-0505.1999.04.007]
 Zhou Shun,Zhang Yane,Cai Tijing,et al.Research on Improved Vibrating Wheel Micromechanical Gyroscope[J].Journal of Southeast University (Natural Science Edition),1999,29(4):30-33.[doi:10.3969/j.issn.1001-0505.1999.04.007]
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改进型振动轮式硅微机械陀螺仪的研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
29
期数:
1999年第4期
页码:
30-33
栏目:
仪器科学与技术
出版日期:
1999-07-20

文章信息/Info

Title:
Research on Improved Vibrating Wheel Micromechanical Gyroscope
作者:
周顺 张燕娥 蔡体菁 周百令 王寿荣
东南大学仪器科学与工程系, 南京 210096
Author(s):
Zhou Shun Zhang Yan’e Cai Tijing Zhou Bailing Wang Shourong
Department of Instrument Science and Engineering, Southeast University, Nanjing 210096
关键词:
微机械陀螺仪 梳状电极驱动 悬浮力 最佳间距
Keywords:
micromechanical gyroscope comb drive electrode levitation optimal displacement
分类号:
U666.123
DOI:
10.3969/j.issn.1001-0505.1999.04.007
摘要:
以W.Geiger提出的改进型振动轮式微机械陀螺仪为研究对象,分析了结构参数与其性能之间的内在联系.探讨了重力场及静电悬浮力对陀螺仪工作性能的影响,并以此为依据,提出音叉式驱动器叉指结构最佳间距的设计准则.
Abstract:
This paper introduces a improved vibrating wheel micromechanical gyroscope designed by W.Geiger. Such a gyroscope has the advantages of simple fabrication and large output characteristics compared with other gyroscopes. The relation between structure and performances of the improved gyroscope is thoroughly studied. This paper analyses the influence of the navigation and electrostatic comb drive levitation to the gyro’s performances. Finally the optimal displacement of its comb drive electrodes is given.

参考文献/References:

[1] Semicondutor chip gyroscopic transducer.United States Patent,5016072.1991-05-14
[2] Comb drive micromechanical tuning fork gyro.United States Patent,5349855.1994-09-27
[3] Greiff P,Antkowiak B,Campbell J,et al.Vibrating wheel micromechanical gyro.In:IEEE Plans,1996,(4):78~82
[4] Tang W C,Lim M G,Howe R T.Electrostatic comb drive levitation and control method.Journal of Micromechanical Systems,1992,1(4):58~63

相似文献/References:

[1]卢海曦,王寿荣,周百令.微机械陀螺仪反馈控制器鲁棒性分析及闭环接口检测电路设计[J].东南大学学报(自然科学版),2011,41(3):526.[doi:10.3969/j.issn.1001-0505.2011.03.019]
 Lu Haixi,Wang Shourong,Zhou Bailing.Robustness analysis of a type of feedback controller and design of closed-loop sensing circuit of micro-machined gyroscope[J].Journal of Southeast University (Natural Science Edition),2011,41(4):526.[doi:10.3969/j.issn.1001-0505.2011.03.019]

备注/Memo

备注/Memo:
基金项目:国防科技预研资助项目(95J1B.3.JW0605).
第一作者:男, 1968年生, 博士研究生.
更新日期/Last Update: 1999-07-20