[1]张彤,毛福明.对He等惰性气体诱导解吸CO过程的理论研究*[J].东南大学学报(自然科学版),1999,29(4):68-72.[doi:10.3969/j.issn.1001-0505.1999.04.015]
 Zhang Tong,Mao Fuming.Theoretical Study of Induced Desorption of CO in Vacuum System by Inert Gases[J].Journal of Southeast University (Natural Science Edition),1999,29(4):68-72.[doi:10.3969/j.issn.1001-0505.1999.04.015]
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对He等惰性气体诱导解吸CO过程的理论研究*()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
29
期数:
1999年第4期
页码:
68-72
栏目:
其他
出版日期:
1999-07-20

文章信息/Info

Title:
Theoretical Study of Induced Desorption of CO in Vacuum System by Inert Gases
作者:
张彤 毛福明
东南大学电子工程系,南京 210096
Author(s):
Zhang Tong Mao Fuming
Department of Electronic Engineering, Southeast University, Nanjing 210096
关键词:
吸附 脱附 位势
Keywords:
adsorption desorption potential energy
分类号:
TB71
DOI:
10.3969/j.issn.1001-0505.1999.04.015
摘要:
在静态进样的质谱分析中,当惰性气体引入真空系统后,原壁面吸附的CO气体被快速解吸出来.极限真空为10 μPa的不锈钢真空系统充入He,Ne或Ar后,CO的解吸速度比未充气时提高8倍,H2和CH4的解吸速度更快.本文从吸附的位势理论出发,对CO气体的快速解吸过程进行了理论分析,这种诱导解吸作用有可能用于研究真空装置内某些吸气体的快速除气,采用预充气法提高充气器件内气体的纯度和采用热封离法提高真空器件内的真空度等措施均基于这个原理.
Abstract:
After the inert gases have been injected in the vacuum system, the gas CO adsorbed in the inner surface will be displaced quickly by the injected gases and released from the surface in the process of the mass spectrometer analysis of static injected samples. After the stainless steel vacuum system with ultimate vacuum of 10 μPa has been filled with He, Ne or Ar, the releasing speed of CO is eight times higher than before, and the releasing speeds of H2 and CH4 are faster than that of CO. It is very probably to use this function of induced desorption in researching a quick outgassing process of vacuum equipment. The procedure of using the pre-fill method to improve the purity of gases in filled-gas devices and using the heat isolate method to improve the vacuum of vacuum devices are all based on this principle. 

参考文献/References:

[1] 高本辉,崔素言.真空物理.北京:科学出版社,1983.366~367
[2] Lewin G.Fundamentals of vacuum science and technology.New York:McGraw-Hill Book Company,1965.36~39
[3] 伏肯斯坦 M B.分子的结构及物理性质.北京:科学出版社,1960.54~55
[4] 中村胜吾.表面物理.张兆祥等译.北京:学术刊物出版社,1989.136~154

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备注/Memo

备注/Memo:
基金项目: 江苏省自然科学基金资助项目(BK97007).
第一作者:男, 1967年生, 博士研究生.
更新日期/Last Update: 1999-07-20