[1]裘安萍,蔡体菁,周百令,等.音叉式硅微机械振动陀螺仪的粘滞阻尼研究[J].东南大学学报(自然科学版),2000,30(1):131-135.[doi:10.3969/j.issn.1001-0505.2000.01.026]
 Qiu Anping,Cai Tijing,Zhou Bailing,et al.Study on Viscous Damping in Silicon Micromechanical Vibratory Gyroscope[J].Journal of Southeast University (Natural Science Edition),2000,30(1):131-135.[doi:10.3969/j.issn.1001-0505.2000.01.026]
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音叉式硅微机械振动陀螺仪的粘滞阻尼研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
30
期数:
2000年第1期
页码:
131-135
栏目:
其他
出版日期:
2000-01-20

文章信息/Info

Title:
Study on Viscous Damping in Silicon Micromechanical Vibratory Gyroscope
作者:
裘安萍 蔡体菁 周百令 王寿荣
东南大学仪器科学与工程系,南京 210096
Author(s):
Qiu Anping Cai Tijing Zhou Bailing Wang Shourong
Department of Instrument Science and Technology, Southeast University, Nanjing 210096
关键词:
硅微机械振动陀螺仪 粘滞阻尼 品质因数
Keywords:
silicon micromechanical vibratory gyroscope viscous damping quality factor
分类号:
V221.1+7
DOI:
10.3969/j.issn.1001-0505.2000.01.026
摘要:
粘滞阻尼的研究对硅微机械振动陀螺仪的设计至关重要.而品质因数的大小反映了阻尼特性.本文首先理论分析了硅微型机械振动陀螺仪粘滞阻尼的耗能,然后根据耗能分析给出了驱动结构和敏感结构的品质因数.
Abstract:
Study on viscous damping is critical for the design of silicon micromechanical vibratory gyroscopes. This paper presents a theoretical study of viscous energy dissipation, and gives the estimating practical quality factor about driven frame and sense frame.

参考文献/References:

[1] Cho Young-Ho,A,1994,40 Kwak Byung Man,Pisano A P,et al.Slide film damping in laterally driven microstructures.Sensor and Actuators,1994,40A:31~39
[2] Starr J B.Squeeze-film in solid-state accelerometers.In:IEEE Solid-State Sensor and Actuator Workshop,USA:Hilton Head Island,SC,1990.44~47

相似文献/References:

[1]程崇庆.关于复模态情况下系统运动方程的解耦问题[J].东南大学学报(自然科学版),1983,13(4):98.[doi:10.3969/j.issn.1001-0505.1983.04.010]
 Cheng Chong-qing.The Decoupling Problem of Equation of Motion in the Case of Complex Modes[J].Journal of Southeast University (Natural Science Edition),1983,13(1):98.[doi:10.3969/j.issn.1001-0505.1983.04.010]

备注/Memo

备注/Memo:
第一作者:女,1971年生, 博士研究生.
更新日期/Last Update: 2000-01-20