[1]席占稳,赖百坛.高gn值悬臂梁式硅微加速度传感器的结构设计[J].东南大学学报(自然科学版),2000,30(6):39-43.[doi:10.3969/j.issn.1001-0505.2000.06.009]
 Xi Zhanwen,Lai Botan.Structure Design of High gn-Force Cantilever Beam Silicon Piezoresistive Accelerometers[J].Journal of Southeast University (Natural Science Edition),2000,30(6):39-43.[doi:10.3969/j.issn.1001-0505.2000.06.009]
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高gn值悬臂梁式硅微加速度传感器的结构设计()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
30
期数:
2000年第6期
页码:
39-43
栏目:
机械工程
出版日期:
2000-11-20

文章信息/Info

Title:
Structure Design of High gn-Force Cantilever Beam Silicon Piezoresistive Accelerometers
作者:
席占稳 赖百坛
南京理工大学, 南京 210094
Author(s):
Xi Zhanwen Lai Botan
Nanjing University of Science and Technology, Nanjing 210094
关键词:
悬臂梁 压阻式加速度计 结构设计
Keywords:
cantilever beam piezoresistive accelerometer structure design
分类号:
TH703
DOI:
10.3969/j.issn.1001-0505.2000.06.009
摘要:
针对高冲击加速度测量,分别就硅微加速度传感器等截面和变截面悬臂梁在不同结构尺寸下的应力状况及固有频率进行了有限元数值模拟; 对等截面和变截面悬臂梁结构的灵敏度进行了分析比较和数值计算,结果都说明了采用变截面悬臂梁结构,灵敏度可提高近30%; 对选择的变截面悬臂梁结构的加速度传感器其量程为10 000gn,有足够的抗过载能力,且横向灵敏度足够小.
Abstract:
Using FEM numerical simulation, the stress distribution and resonance frequency are presented for different structure dimensions to equal cross-section and non-equal cross-section cantilever beam of silicon piezoresistive accelerometers. Analysis and numerical calculation of sensitivity to equal cross-section and non-equal section cantilever beam are completed, the results show that the sensitivity of non-equal cross-section cantilever beam can be improved about 30 percent. To optimized structural dimensions of cantilever beam, the range of acceleration is greater than 10 000 gn, lateral sensitivity can be neglected, over-load ability is satisfactory.

参考文献/References:

[1] Yuebin Ning.Fabrication and characterization of high gn-force,silicon piezoresistive accelerometers.Sensors and Actuators,1995,A48:55~61
[2] Van Kampen R P.Modeling the mechanical behavior of bulk-micromachined silicon accelerometers.Sensor and Actuators,1998,A64:137~150
[3] 陈宏,沈绍群,鲍敏杭.硅微加速度传感器过载能力的研究.传感技术学报,1996(4):1~5
[4] 范宁军.微机械加工伺服加速度传感器技术:[学位论文].南京:南京理工大学,1999

备注/Memo

备注/Memo:
基金项目:国防预研基金资助项目.
第一作者:男,1963年生,博士研究生,高级工程师.
更新日期/Last Update: 2000-11-20