[1]张迎新,刘京南,陈从颜.高精度位置检测及定位技术研究[J].东南大学学报(自然科学版),2003,33(4):495-497.[doi:10.3969/j.issn.1001-0505.2003.04.028]
 Zhang Yingxin,Liu Jingnan,Chen Congyan.Research on high-accuracy position detection and alignment technology[J].Journal of Southeast University (Natural Science Edition),2003,33(4):495-497.[doi:10.3969/j.issn.1001-0505.2003.04.028]
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高精度位置检测及定位技术研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
33
期数:
2003年第4期
页码:
495-497
栏目:
自动化
出版日期:
2003-07-20

文章信息/Info

Title:
Research on high-accuracy position detection and alignment technology
作者:
张迎新 刘京南 陈从颜
东南大学自动控制系, 南京 210096
Author(s):
Zhang Yingxin Liu Jingnan Chen Congyan
Department of Automatic Control Engineering, Southeast University, Nanjing 210096, China
关键词:
光栅 差动摩尔 精密定位
Keywords:
grating differential Moir precise positioning
分类号:
TP23
DOI:
10.3969/j.issn.1001-0505.2003.04.028
摘要:
介绍了利用差动摩尔技术进行高精密位置检测的理论基础及其自动定位系统的实现.差动摩尔信号将反映位移变化的光强值有效地放大1倍,极大地提高了位置检测信号的灵敏度.工控机根据检测到的差动摩尔信号不断地发出控制脉冲,采用步进电机驱动工作台到达±0.5 μm的定位精度,并使位置偏差始终控制在此精度范围内.给出了系统构造和整个定位过程的实验曲线,结果说明差动摩尔技术是一种有前途的新型定位方法.
Abstract:
The basic theory of high precise position detection using differential Moiré technique is introduced, and a precise automatic alignment system was designed and achieved. Differential Moiré signals magnify the laser intensity 2 times, which denotes the position variations, and highly improve the sensibility of position detection signals. According to the differential Moiré signals, computer sends control pulses continuously to Motors. The alignment with an accuracy of ±0.5 μm is achieved and maintained. The automatic alignment system construction and experiment results are presented. It proves that the differential Moiré technique is a novel and promising precise positioning method.

参考文献/References:

[1] Liu J,Funhashi H.Precision position control system using Moiré signals[J].Proceedings of the 1995 IEEE IECON,1995,2:968-972.
[2] Zhou L,Liu J.Precision alignment system using laser Moiré sensor[A].In:The 2nd Japan-China Symposium on Mechatronics[C].Chengdu,China,1997.16-18.
[3] Kanjilal Alok Kumar.Automatic mask alignment without a microscope[J].IEEE Transactions on Instrumentation and Measurement,1995,44(3):806-809.
[4] Liu J,Singh B P,Furuhashi H,et al.Fully automatic computer controlled mask alignment using Moir technique[A].In:The Third Asian/Pacific International Symposium on Instrumentation,Measurement and Automatic Control[C].Beijing,China,1996.211-217.
[5] Hara K,Uchida Y,Nomura T,et al.An alignment technique using diffracted Moiré signals[J].Journal of Vacuum Science and Technology, 1989,B7(6):1977-1979.

备注/Memo

备注/Memo:
作者简介: 张迎新(1972—),男,博士生; 刘京南(联系人),男,教授,博士生导师, liujn@seu.edu.cn.
更新日期/Last Update: 2003-07-20