[1]张金龙,余玲玲,内田敬久,等.精密平面定位技术[J].东南大学学报(自然科学版),2005,35(3):456-459.[doi:10.3969/j.issn.1001-0505.2005.03.028]
 Zhang Jinlong,Yu Lingling,Yoshihisa Uchida,et al.Research on precision plane positioning[J].Journal of Southeast University (Natural Science Edition),2005,35(3):456-459.[doi:10.3969/j.issn.1001-0505.2005.03.028]
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精密平面定位技术()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
35
期数:
2005年第3期
页码:
456-459
栏目:
自动化
出版日期:
2005-05-20

文章信息/Info

Title:
Research on precision plane positioning
作者:
张金龙12 余玲玲1 内田敬久3 刘京南1
1 东南大学自动控制系, 南京 210096; 2 南京师范大学电气与自动化工程学院, 南京 210042; 3 爱知工业大学智能机械工学科, 日本丰田市 470-0392
Author(s):
Zhang Jinlong12 Yu Lingling1 Yoshihisa Uchida3 Liu Jingnan1
1 Department of Automatic Control Engineering, Southeast University, Nanjing 210096, China
2 College of Electrical and Automatic Engineering, Nanjing Normal University, Nanjing 210042, China
3 Department of Intelli
关键词:
平面定位 莫尔信号 差动技术 微机控制
Keywords:
plane alignment Moiré signals differential technique microcomputer control
分类号:
TP274.5
DOI:
10.3969/j.issn.1001-0505.2005.03.028
摘要:
针对精密平面定位影响因素多、控制复杂及定位困难等问题,提出了一种新的精密平面定位方法,该方法采用激光莫尔技术,以上下2组100 μm的衍射光栅作为定位标记,通过微机闭环控制,可实现X-Y-θ三自由度的全自动精密平面定位.2组光栅相位相差180°,构成差动光栅技术,可有效提高位置检测信号灵敏度及定位精度.系统在软、硬件方面采取的一系列抗干扰措施,确保了较高的定位精度及工作可靠性.实验结果表明,基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度,对精密加工工程等领域具有重要的实用价值.
Abstract:
Moiré technique is adopted and alignment marks are used in the form of 100 μm pitch gratings. Based on these, the automatic precision plane alignment in X-Y-θ can be achieved using computer controlled Moiré technique. Two sets of diffractive gratings with a phase difference of 180° form a differential grating and greatly improve the sensitivity of position signals and positioning precision. A series of anti-interference step in the hardware and software of the device effectively improve positioning accuracy and reliability of the device. The experimental results show that the apparatus based on Moiré signal can achieve plane positioning accuracy of the order of sub-micron. The method is of high value for the advancement of precision manufacturing technology.

参考文献/References:

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[11] 张迎新,刘京南,陈从颜.高精度位置检测及定位技术的研究[J].东南大学学报(自然科学版),2003,33(4):495-497.
  Zhang Yingxin,Liu Jingnan,Chen Congyan.Research on high-accuracy position detection and alignment technology[J].Journal of Southeast University(Natural Science Edition), 2003,33(4):495-497.(in Chinese)

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 Zhang Jinlong,Liu Yang,Yang Ankang,et al.Compound precise alignment technique of plasma display panel[J].Journal of Southeast University (Natural Science Edition),2009,39(3):758.[doi:10.3969/j.issn.1001-0505.2009.04.021]

备注/Memo

备注/Memo:
基金项目: 江苏省高等学校自然科学研究计划资助项目(04KJB510073).
作者简介: 张金龙(1965—),男,博士生,副教授; 刘京南(联系人),男,博士,教授,博士生导师,liujn@seu.edu.cn.
更新日期/Last Update: 2005-05-20