[1]孙建波,秦明,黄庆安.CMOS工艺实现的热风速传感器及其封装[J].东南大学学报(自然科学版),2005,35(6):886-888.[doi:10.3969/j.issn.1001-0505.2005.06.012]
 Sun Jianbo,Qin Ming,Huang Qingan.CMOS thermal wind sensor and its package[J].Journal of Southeast University (Natural Science Edition),2005,35(6):886-888.[doi:10.3969/j.issn.1001-0505.2005.06.012]
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CMOS工艺实现的热风速传感器及其封装()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
35
期数:
2005年第6期
页码:
886-888
栏目:
电子科学与工程
出版日期:
2005-11-20

文章信息/Info

Title:
CMOS thermal wind sensor and its package
作者:
孙建波 秦明 黄庆安
东南大学MEMS教育部重点实验室, 南京 210096
Author(s):
Sun Jianbo Qin Ming Huang Qing’an
Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
关键词:
风速传感器 恒温差 封装
Keywords:
wind sensor constant-temperature-difference mode package
分类号:
TN379
DOI:
10.3969/j.issn.1001-0505.2005.06.012
摘要:
给出了一种完全基于CMOS工艺的热风速传感器及其封装的结构、工作原理以及测试结果.该传感器由加热元件和测温元件构成,多晶硅加热电阻元件产生一定的温度分布, CMOS纵向衬底晶体管实现由风速导致的温度变化的测量.传感器的封装采用导热胶在背面贴陶瓷的方式进行.该传感器采用恒温差工作模式,风速测量采用热损失型原理,测试电路是由仪器放大器组成的控制和测试系统.经过风洞测试,风速的测量可以达到30 m/s,风速分辨率达到0.5 m/s.传感器的功耗最大值小于100 mW.
Abstract:
A thermal wind sensor by CMOS(complementary-metal-oxide-semiconductor)technology as well as its package is presented. The sensor consists of heaters and temperature sensors; polysilicon resistor heaters form a temperature distribution on the surface of the sensor chip and a CMOS vertical substrate bipolar transistor in the center of the sensor chip measures the change of the wind-induced temperature distribution. The sensor chip is packaged using thin ceramic substrate pasting to the back surface of the die with the glue of high thermal conductivity. The packaged sensor is operated on constant-temperature-difference(CTD)mode. Wind speed is measured from the voltage output of the heater. The interface and control circuits have been designed with instrumentation amplifiers. Wind tunnel measurements have been carried out, and the wind speed is up to 30 m/s, while the resolution is 0.5 m/s. The maximum power consumption is less than 100 mW.

参考文献/References:

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备注/Memo

备注/Memo:
基金项目: 国家自然科学基金资助项目(60476019)、江苏省自然科学基金资助项目(BK2003052).
作者简介: 孙建波(1981—), 男, 硕士生; 秦 明(联系人), 男, 博士, 教授, 博士生导师, mqin@seu.edu.cn.
更新日期/Last Update: 2005-11-20