[1]焦永昌,廖小平,张俊.基于MEMS技术的差分式微波信号相位检测器[J].东南大学学报(自然科学版),2009,39(1):141-145.[doi:10.3969/j.issn.1001-0505.2009.01.027]
 Jiao Yongchang,Liao Xiaoping,Zhang Jun.Differential microwave phase detector based on MEMS technology[J].Journal of Southeast University (Natural Science Edition),2009,39(1):141-145.[doi:10.3969/j.issn.1001-0505.2009.01.027]
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基于MEMS技术的差分式微波信号相位检测器()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
39
期数:
2009年第1期
页码:
141-145
栏目:
电磁场与微波技术
出版日期:
2009-01-20

文章信息/Info

Title:
Differential microwave phase detector based on MEMS technology
作者:
焦永昌 廖小平 张俊
东南大学MEMS教育部重点实验室, 南京 210096
Author(s):
Jiao Yongchang Liao Xiaoping Zhang Jun
Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
关键词:
相位检测 功分器 移相器 MEMS电容式微波功率传感器
Keywords:
phase detector power divider phase shifter MEMS capacitive RF power sensor
分类号:
TN06
DOI:
10.3969/j.issn.1001-0505.2009.01.027
摘要:
提出了基于MEMS技术,由功分器、45°移相器和MEMS电容式微波功率传感器组成差分式微波信号相位检测器,实现了在被测信号幅度未知条件下全周期的相位测量.利用HFSS对各组件进行了模拟设计,包括功分器的模拟与设计和MEMS电容式微波功率传感器的模拟与设计,特别采用GaAs MMIC工艺制作了其中的MEMS电容式微波功率传感器,在8~12 GHz的频率范围内,回波损耗小于-20 dB,插入损耗小于0.2 dB.最后利用ADS对整个系统进行了模拟,模拟结果与理论计算结果的误差在3.5%以内,并进行了误差分析.
Abstract:
A differential microwave detector, based on MEMS(micro-electro-mechanical systems)technology for the first time is described. The system consists of power divider, 45°phase shifter and MEMS capacitive RF(radio frequency)power sensor. The phase of the signal with the whole period can be tested without giving the value of magnitude. The components of this system have been designed and simulated by HFSS(high frequency structure simulator), including the simulation and design of the power divider and the MEMS capacitive RF power sensor. The MEMS capacitive RF power sensor has been fabricated by GaAs(gallium arsenide)MMIC(monolithic microwave integrated circuit)process, return loss is lower than-20 dB, insertion loss is lower than 0.2 dB for 8-12 GHz. Simulation data of the system with ADS(advanced design system)are shown and compared with theoretical analysis results. The relative error is less than 3.5%, and the error analysis is also presented.

参考文献/References:

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备注/Memo

备注/Memo:
作者简介: 焦永昌(1982—),男,硕士生; 廖小平(联系人),男,博士,教授,博士生导师, xpliao@seu.edu.cn.
基金项目: 国家自然科学基金资助项目(60676043).
引文格式: 焦永昌,廖小平,张俊.基于MEMS技术的差分式微波信号相位检测器[J].东南大学学报:自然科学版,2009,39(1):141-145.
更新日期/Last Update: 2009-01-20