[1]余辉洋,顾兴莲,秦明.一种可用于雨量测量的压力传感器[J].东南大学学报(自然科学版),2010,40(3):522-526.[doi:10.3969/j.issn.1001-0505.2010.03.017]
 Yu Huiyang,Gu Xinglian,Qin Ming.Pressure sensor used in measuring rain[J].Journal of Southeast University (Natural Science Edition),2010,40(3):522-526.[doi:10.3969/j.issn.1001-0505.2010.03.017]
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一种可用于雨量测量的压力传感器()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
40
期数:
2010年第3期
页码:
522-526
栏目:
自动化
出版日期:
2010-05-20

文章信息/Info

Title:
Pressure sensor used in measuring rain
作者:
余辉洋 顾兴莲 秦明
东南大学微电子机械系统教育部重点实验室, 南京 210096
Author(s):
Yu Huiyang Gu Xinglian Qin Ming
Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China
关键词:
MEMS 电容 雨量传感器
Keywords:
micro electro mechanical system capacitive rain sensor
分类号:
TP212.1
DOI:
10.3969/j.issn.1001-0505.2010.03.017
摘要:
设计了一种可用于测雨压的压力传感器,给出了传感器结构及其微加工流程.传感器由3×3的压敏电容阵列组成,压敏电容将压力信号转换成电容信号,通过检测雨水冲击作用间接测量雨量的大小.基于弹性力学理论建立了传感器的力学模型,并与ANSYS有限元分析软件进行比较,结果表明理论模型具有较好的精度.介绍了传感器制作的微加工工艺流程并采用硅橡胶对传感器进行防水密封封装,并给出了制作完成后传感器的测试结果,从测试结果可以看出该雨量传感器的灵敏度可以达到2.255 7 fF/Pa.
Abstract:
A novel MEMS(micro electro mechanical system)capacitive rain sensor is designed, and the structure and the micro-fabrication process of which is given. The sensor consists of a 3×3 capacitor matrix. The sensitive capacitances of the sensor change the pressure signal into the capacitive signal and detect the strength of the rain through detecting the impact effect of the rain. The model of the sensor is established based on the elasticity principle and then are compared the theoretical analysis results with the ANSYS FEA(finite element analysis)simulation. The results indicate that the theoretical model has high precision. After that, the fabrication processing is introduced, and this rain sensor is packaged by silica gel to protect the sensor from water. A test is given on this rain sensor, and the test results indicate that the sensitivity of this sensor can reach 2.255 7 fF/Pa.

参考文献/References:

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备注/Memo

备注/Memo:
作者简介: 余辉洋(1985—),女,博士生; 秦明(联系人),男,博士,教授,博士生导师,mqin@seu.edu.cn.
基金项目: 国家高技术研究发展计划(863计划)资助项目(2007AA04Z306).
引文格式: 余辉洋,顾兴莲,秦明.一种可用于雨量测量的压力传感器[J].东南大学学报:自然科学版,2010,40(3):522-526. [doi:10.3969/j.issn.1001-0505.2010.03.017]
更新日期/Last Update: 2010-05-20