[1]倪云舫,李宏生,黄丽斌,等.硅微陀螺正交校正结构设计与试验[J].东南大学学报(自然科学版),2013,43(6):1227-1231.[doi:10.3969/j.issn.1001-0505.2013.06.018]
 Ni Yunfang,Li Hongsheng,Huang Libin,et al.Design and test of quadrature correction structure for silicon micro-gyroscope[J].Journal of Southeast University (Natural Science Edition),2013,43(6):1227-1231.[doi:10.3969/j.issn.1001-0505.2013.06.018]
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硅微陀螺正交校正结构设计与试验()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
43
期数:
2013年第6期
页码:
1227-1231
栏目:
机械工程
出版日期:
2013-11-20

文章信息/Info

Title:
Design and test of quadrature correction structure for silicon micro-gyroscope
作者:
倪云舫李宏生黄丽斌赵立业
东南大学仪器科学与工程学院, 南京 210096; 东南大学微惯性仪表与先进导航技术教育部重点实验室, 南京 210096
Author(s):
Ni Yunfang Li Hongsheng Huang Libin Zhao Liye
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Southeast University, Nanjing 210096, China
关键词:
硅微陀螺 正交校正 静电修调 直流电压 结构设计
Keywords:
silicon micro-gyroscope quadrature correction electrostatic trimming DC(direct current)voltage structure design
分类号:
TH824.3
DOI:
10.3969/j.issn.1001-0505.2013.06.018
摘要:
为从源头上消除硅微陀螺的正交误差,采用静电修调方法,研究正交校正结构设计问题.在分析静电修调原理的基础上,探讨校正电极设计原则以及结构形式的选取,设计布局方案消除干扰静电力,并通过参数优化提高校正结构的面积利用效率.为自主研制的某型双质量硅微陀螺设计正交校正结构,使其理论上具备以12 V直流电压校正405(°)/s正交误差的能力.加工试验表明,对具有354(°)/s正交误差的表头,施加11.6 V直流电压可实现正交校正,结构的正交校正能力略小于但接近设计值.研究的正交校正结构设计方法在线振动式Z轴硅微陀螺中具备通用性和实用价值.
Abstract:
To eliminate quadrature error of silicon micro-gyroscope at the source, electrostatic trimming is employed and design issues about quadrature correction structure are investigated. Based on the analysis of the electrostatic trimming principle, design fundamentals and pattern selection of the correction electrodes are discussed. A layout scheme was designed to eliminate interfering electrostatic forces and parameter optimization was carried out to improve the area utilization efficiency. For a dual-mass silicon micro-gyroscope developed by our laboratory, quadrature correction structure was designed with a theoretical capability of correcting quadrature error up to 405(°)/s with DC(direct current)voltage less than 12 V. Experimental results on a processed and packaged gyroscope show that for the actual quadrature error of 354(°)/s, quadrature correction can be realized with a DC voltage of 11.6 V. The correction capability is a little smaller than but approaching the designed value. The design methods are commonly applicable on a linear vibrated Z-axis silicon micro-gyroscope and have their practical application values.

参考文献/References:

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备注/Memo

备注/Memo:
作者简介: 倪云舫(1986—),女,博士生;李宏生(联系人),男,博士,教授,博士生导师,hsli@seu.edu.cn.
基金项目: 中央高校基本科研业务费专项资金资助项目(3222003102).
引文格式: 倪云舫,李宏生,黄丽斌,等.硅微陀螺正交校正结构设计与试验[J].东南大学学报:自然科学版,2013,43(6):1227-1231. [doi:10.3969/j.issn.1001-0505.2013.06.018]
更新日期/Last Update: 2013-11-20