[1]刘炳坤,任家生,崔秀华,等.ZDB-150型闭循环氦致冷机低温泵的实验研究[J].东南大学学报(自然科学版),1980,10(2):14-22.[doi:10.3969/j.issn.1001-0505.1980.02.002]
 Liu Bing-kun,Ren Jia-sheng,Cui Xiu-hua,et al.An Experimental Study of ZDB-150 Type Cryogenic Vacuum Pump with Closed-Cycle Refrigerator[J].Journal of Southeast University (Natural Science Edition),1980,10(2):14-22.[doi:10.3969/j.issn.1001-0505.1980.02.002]
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ZDB-150型闭循环氦致冷机低温泵的实验研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
10
期数:
1980年第2期
页码:
14-22
栏目:
本刊信息
出版日期:
1980-06-20

文章信息/Info

Title:
An Experimental Study of ZDB-150 Type Cryogenic Vacuum Pump with Closed-Cycle Refrigerator
作者:
刘炳坤任家生崔秀华马达音
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Author(s):
Liu Bing-kun Ren Jia-sheng Cui Xiu-hua Ma Da-yin
关键词:
低温泵 致冷机 抽速 吸附剂 气体分子运动论 屏蔽罩 低温板 真空获得 极限压强 活性碳
分类号:
+
DOI:
10.3969/j.issn.1001-0505.1980.02.002
摘要:
低温抽气是超高真空获得技术的新方法,它具有抽速大、工作压强范围宽、效率高、清洁无污染等特点。本文介绍了ZDB—150型低温泵的设计原理和实际结构。在实验的基础上,得出了泵的主要性能指标,并对实验结果进行了讨论。同时,就该泵的主要性能与国外同类产品进行了比较。
Abstract:
Cryogenic pumping represents the latest method in high and ultra-high vacuum-obtaining technique. It has the advantages of high pumping speed, freedom from hydrocarbon-contamination, and adaptability to a wide range of operating pressure. This paper deals with the design concepts, the actual construction and the main performances of ZDB-150 type cryopump. In the free molecule flow region the pumping-speed is greater than 650 1/sec and 1400 1/see for air and hydrogen respectively. The ultimate pressure is less than 6×10^{-10} torr. The two-stage G-M closed-cycle refrigerator provides 2.5 watts at 15 K for the second stage and 25 watts at 70 K for the first stage. A comparison between the performances of the ZDB-150 cryopump and some other commercial types is listed at the end of this paper.
更新日期/Last Update: 2013-05-01