[1]刘卫东,魏同立,李垚.低温CMOS-器件物理和互连特性[J].东南大学学报(自然科学版),1995,25(4):64-72.[doi:10.3969/j.issn.1001-0505.1995.04.012]
 Liu Weidong,Wei,Tongli,et al.Low-Temperature CMOS-Device Physics and Interconnection Properties[J].Journal of Southeast University (Natural Science Edition),1995,25(4):64-72.[doi:10.3969/j.issn.1001-0505.1995.04.012]
点击复制

低温CMOS-器件物理和互连特性()
分享到:

《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
25
期数:
1995年第4期
页码:
64-72
栏目:
电路与系统
出版日期:
1995-07-20

文章信息/Info

Title:
Low-Temperature CMOS-Device Physics and Interconnection Properties
作者:
刘卫东魏同立李垚
东南大学微电子中心
Author(s):
Liu Weidong;Wei Tongli;Li Yao
Microelectronics Center,Southeast University,Nanjing 210018
关键词:
低温 CMOS 冻析 迁移率/互连 阈值特性 散射 多晶硅栅 金-半欧姆接触
分类号:
TN401
DOI:
10.3969/j.issn.1001-0505.1995.04.012
摘要:
本文概述低温CMOS的器件物理及其中的互连特性。详细分析了MOS结构中载流的冻析效应,低温迁移率和漂移速度,并讨论了MOS器件的低温阈值特性。对低温下多晶硅和TiSi2等互连以及金一半欧姆接触特性,也作了扼要讨论。本文的结果和结论对于优化低温CMOS结构和器件参数具有一定的参考价值。

相似文献/References:

[1]郁炜嘉,朱恩,程树东,等.0.18-μm CMOS千兆以太网并串转换芯片设计[J].东南大学学报(自然科学版),2004,34(3):293.[doi:10.3969/j.issn.1001-0505.2004.03.002]
 Yu Weijia,Zhu En,Cheng Shudong,et al.0.18-μm CMOS serializer for gigabit Ethernet[J].Journal of Southeast University (Natural Science Edition),2004,34(4):293.[doi:10.3969/j.issn.1001-0505.2004.03.002]
[2]常昌远,王绍权,陈瑶,等.一种低相位噪声LC压控振荡器的设计与实现[J].东南大学学报(自然科学版),2012,42(6):1052.[doi:10.3969/j.issn.1001-0505.2012.06.006]
 Chang Changyuan,Wang Shaoquan,Chen Yao,et al.Design and implementation of LC voltage controlled oscillator with low phase noise[J].Journal of Southeast University (Natural Science Edition),2012,42(4):1052.[doi:10.3969/j.issn.1001-0505.2012.06.006]
[3]刘卫东,魏同立.MOSFET低温热载流子效应[J].东南大学学报(自然科学版),1994,24(2):15.[doi:10.3969/j.issn.1001-0505.1994.02.003]
 Liu Weidong,Wei Tongli.Low Temperature Hot Carrier Effects in MOSFET’s[J].Journal of Southeast University (Natural Science Edition),1994,24(4):15.[doi:10.3969/j.issn.1001-0505.1994.02.003]
[4]方峰,蒋建清,马驰.硫酸羟胺对低温磷化过程的影响[J].东南大学学报(自然科学版),2007,37(3):470.[doi:10.3969/j.issn.1001-0505.2007.03.023]
 Fang Feng,Jiang Jianqing,Ma Chi.Effect of hydroxylamine sulfate accelerator on low-temperature phosphating process[J].Journal of Southeast University (Natural Science Edition),2007,37(4):470.[doi:10.3969/j.issn.1001-0505.2007.03.023]
[5]雷恺,冯军,黄璐,等.10 Gbit/s 0.18 μm CMOS激光驱动器的集成电路[J].东南大学学报(自然科学版),2005,35(4):510.[doi:10.3969/j.issn.1001-0505.2005.04.003]
 Lei Kai,Feng Jun,Huang Lu,et al.10 Gbit/s 0.18 μm CMOS laser diode driver IC[J].Journal of Southeast University (Natural Science Edition),2005,35(4):510.[doi:10.3969/j.issn.1001-0505.2005.04.003]
[6]李垚,魏同立.ECL电路传输延迟时间tpd的全温区分析[J].东南大学学报(自然科学版),1996,26(1):1.[doi:10.3969/j.issn.1001-0505.1996.01.001]
 Li Yao,Wei,Tongli.Analysis of Propagation Delay tpd for ECL Circuits in the Whole Range of 77 ̄300K[J].Journal of Southeast University (Natural Science Edition),1996,26(4):1.[doi:10.3969/j.issn.1001-0505.1996.01.001]
[7]李垚,魏同立,沈克强.低温高速双极晶体管基区的优化设计[J].东南大学学报(自然科学版),1995,25(3):34.[doi:10.3969/j.issn.1001-0505.1995.03.007]
 Li Yao,Wei Tongli,et al.Optimizing the Base Profile for High-SpeedBipolar Transistore at Low Temperature[J].Journal of Southeast University (Natural Science Edition),1995,25(4):34.[doi:10.3969/j.issn.1001-0505.1995.03.007]
[8]曹俊诚,魏同立.77KMOS器件计算机模拟及软件实现[J].东南大学学报(自然科学版),1994,24(5):42.[doi:10.3969/j.issn.1001-0505.1994.05.008]
 Cao Juncheng,Wei Tongli.Simulation and Softwae for MOSFET at 77K[J].Journal of Southeast University (Natural Science Edition),1994,24(4):42.[doi:10.3969/j.issn.1001-0505.1994.05.008]
[9]唐欣,黄风义,唐旭升,等.应用于IMT-A和UWB系统的双频段开关电流源压控振荡器设计[J].东南大学学报(自然科学版),2013,43(3):473.[doi:10.3969/j.issn.1001-0505.2013.03.005]
 Tang Xin,Huang Fengyi,Tang Xusheng,et al.Dual-band VCO using switched current source for IMT-advanced and UWB applications[J].Journal of Southeast University (Natural Science Edition),2013,43(4):473.[doi:10.3969/j.issn.1001-0505.2013.03.005]
[10]张丰,白银,蔡跃波.溴化钙对水泥基材料强度及微观结构影响[J].东南大学学报(自然科学版),2020,50(2):311.[doi:10.3969/j.issn.1001-0505.2020.02.015]
 Zhang Feng,Bai Yin,Cai Yuebo.Effect of calcium bromide on strength and microstructure of cement-based materials[J].Journal of Southeast University (Natural Science Edition),2020,50(4):311.[doi:10.3969/j.issn.1001-0505.2020.02.015]

更新日期/Last Update: 2013-04-29