[1]李明,周百令.硅微型加速度计有限元模型与动态分析研究[J].东南大学学报(自然科学版),1999,29(5):81-85.[doi:10.3969/j.issn.1001-0505.1999.05.017]
 Li Ming,Zhou Bailing.Finite_Element Models and Dynamic Analysis of Micro Silicon Accelerometer[J].Journal of Southeast University (Natural Science Edition),1999,29(5):81-85.[doi:10.3969/j.issn.1001-0505.1999.05.017]
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硅微型加速度计有限元模型与动态分析研究()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
29
期数:
1999年第5期
页码:
81-85
栏目:
仪器科学与技术
出版日期:
1999-09-20

文章信息/Info

Title:
Finite_Element Models and Dynamic Analysis of Micro Silicon Accelerometer
作者:
李明 周百令
东南大学仪器科学与工程系, 南京 210096
Author(s):
Li Ming Zhou Bailing
Department of Instrument Science and Engineering, Southeast University, Nanjing 210096
关键词:
硅微型加速度计 有限元 模态分析
Keywords:
micro silicon accelerometer finite_element modal analysis
分类号:
U666.123
DOI:
10.3969/j.issn.1001-0505.1999.05.017
摘要:
由于硅微型加速度计高动态性能和特殊的制造工艺,在设计阶段必须对其进行详细的结构动态分析.本文建立了微加速度计三维有限元模型,分析计算了其基本模态,研究了其瞬态响应和响应谱等动态特性.
Abstract:
Micro silicon accelerometer should be dynamically analyzed and simulated early in the design phase due to the high requirement of dynamic performance and special micro fabrication techniques. A 3D finite_element model of micro silicon accelerometer is built and mode_frequency is computed. Further more, dynamic character such as transient response and spectrum is researched.

参考文献/References:

[1] 陈玮.硅微型扭摆式力平衡加速度计的设计理论与仿真研究:[学位论文].南京:东南大学仪器科学工程系,1998
[2] 才海勇.微加速度传感器的动态特性补偿方法研究.见:微米/纳米第3届技术学术会议论文集.北京:清华大学出版社,1996.20~25
[3] 朱迎善.谱分析及其在振动中的应用.武汉:华中理工大学出版社,1991.45~47

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备注/Memo

备注/Memo:
基金项目:国防科技预研基金资助项目(97J43.3.1).
第一作者:男,1970年生,博士研究生.
更新日期/Last Update: 1999-09-20