[1]王德育,袁春伟.TiO2薄膜厚度及其光学常数的测量[J].东南大学学报(自然科学版),1999,29(5):105-108.[doi:10.3969/j.issn.1001-0505.1999.05.022]
 Wang Deyu,Yuan Chunwei.Determination of the Thickness and Optical Constants of TiO2 Film[J].Journal of Southeast University (Natural Science Edition),1999,29(5):105-108.[doi:10.3969/j.issn.1001-0505.1999.05.022]
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TiO2薄膜厚度及其光学常数的测量()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
29
期数:
1999年第5期
页码:
105-108
栏目:
数学、物理学、力学
出版日期:
1999-09-20

文章信息/Info

Title:
Determination of the Thickness and Optical Constants of TiO2 Film
作者:
王德育 袁春伟
东南大学分子与生物分子电子学实验室,南京 210096
Author(s):
Wang Deyu Yuan Chunwei
National Laboratory of Molecular and Biomolecular Electronics, Southeast University, Nanjing 210096
关键词:
非线性回归模型 薄膜 光学常数
Keywords:
nonlinear regression model thin film optical constant
分类号:
O433.4
DOI:
10.3969/j.issn.1001-0505.1999.05.022
摘要:
描述了非线性回归模型在TiO2薄膜的光学常数及其厚度测量中的应用.利用薄膜在可见光范围内的光谱特性使用曲线拟合技术对它的光学常数进行了测量.研究结果表明,这种方法可以简单、高效地应用于对薄膜厚度及其光学常数的测量.
Abstract:
In this paper, a nonlinear regression model is utilized to measure the optical constants of TiO2 thin film. We measured the optical constants by fitting the visible transmission spectra. The results suggest that this method can be applied to estimate optical constants, such as dispersion refractive index, thickness and absorption coefficient effectively for its versatility.

参考文献/References:

[1] Eugene H,Alfred Z.Optics.New York:Addison-Wesley,1985.277~308
[2] Max Born,Emil Wolt.Principles of optics.Berlin:Pergamon,1990.512~520
[3] Lin Y,Motesharei K,Dancil S,et al.A porous silicon-based optical interferometric bilsensor.Science,1997,278(31):840~843
[4] Gauglitz G,Brecht A,Kraus G.Chemical and biochemical sensors based on interferometry at him (multi-) layers.Sensors and Actuators B,1993(11):21~27
[5] Swanepoel R.Determination of the thickness and optical constants of amorphous silicon.J Phys E Sci Instrum,1983,16(6):1214~1222
[6] Chiao C,Bovard G,Macleod A.Optical-constant calculation over an extended spectral region:application to titanium dioxide film.Applied Optics,1995,34(31):7355~7360
[7] Corales C,Ramirez-Maol B,Fernandez-Pena P,et al.Determining the refractive index and average thickness of AsSe semiconducting glass films from wavelength measurements only.Applied Optics,1995,34(34):7907~7913
[8] Heavens S.Optical properties of thin solid films.New York:Dover,1991.1~97
[9] Goodman F.Statistical optics.New York:Academic Press,1985.199
[10〖KG*2〗Watts G.Estimating parameters in nonlinear rate equations.The Canagian Journal of Chemical Engineering,1994,72(8):701~710
[11] Dobrowolski J,Ho C,Waldorf A.Determination of optical constants of thin film coating materials base on inverse synthesis.Applied Optics,1983,22(20):3191~3200

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备注/Memo

备注/Memo:
第一作者:男, 1967年生, 博士研究生.
更新日期/Last Update: 1999-09-20