[1]杨拥军,李立杰,徐永青,等.一种新型的微机械电子隧穿加速度计[J].东南大学学报(自然科学版),2000,30(6):23-27.[doi:10.3969/j.issn.1001-0505.2000.06.006]
 Yang Yongjun,Li Lijie,Xu YongqingZhao Yanjun,et al.A Novel Micromachined Electron Tunneling Accelerometer[J].Journal of Southeast University (Natural Science Edition),2000,30(6):23-27.[doi:10.3969/j.issn.1001-0505.2000.06.006]
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一种新型的微机械电子隧穿加速度计()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
30
期数:
2000年第6期
页码:
23-27
栏目:
机械工程
出版日期:
2000-11-20

文章信息/Info

Title:
A Novel Micromachined Electron Tunneling Accelerometer
作者:
杨拥军1 李立杰2 徐永青2 赵彦军2 梁春广2 魏同立1
1 东南大学微电子中心,南京 210096; 2 河北半导体研究所,石家庄 050051
Author(s):
Yang Yongjun1 Li Lijie2 Xu Yongqing2Zhao Yanjun2 Liang Chunguang2 Wei Tongli1
1 Microelectronic Center, Southeast University, Nanjing 210096
2 Hebei Semiconductor Research Institure, Shijiazhuang 050051
关键词:
加速度计 电子隧穿 微机械
Keywords:
accelerometer electron tunneling micromachine
分类号:
TH824+.4
DOI:
10.3969/j.issn.1001-0505.2000.06.006
摘要:
介绍了一种新型的微机械电子隧穿加速度计.利用体硅微机械加工工艺和硅/玻璃静电键合技术成功研制出了一种三明治结构的隧穿加速度计.为了有效减小低频噪声,在反馈回路里加入了振荡器和解调器.测试结果表明,目前样品的分辨率约为10-6g/(Hz)1/2,抗冲击能力达到50g.
Abstract:
A novel micromachined tunneling acceleroneter is described. Using the bulk-silicon fabrication technology and the silicon/glass electrostatic bonding process, a sandwich structure tunneling accelerometer was fabricated and tested. In order to reduce the low frequency noise, the feedback circuit was improved by adding oscillator and demodulator. The first prototype has a resolution of approximately 10-6g/(Hz)1/2, and can survive with at least 50g shocking.

参考文献/References:

[1] Waltman S B,Kaiser W J.An electron tunneling sensor.Sensors and Actuators,1989,19:201~210
[2] Kenny T W,Waltman S B,Reynolds J K,et al.A micromacomachined silicon tunneling sensor.In:Proc IEEE Micro Electro Mechanical Systems Conf.Napa Valley,USA,1990.192~196
[3] Rockstad H K,Kenny T W,Reynolds J K,et al.A miniature high-sensitivity Broad-band accelerometer based on electron tunneling transducers.Sensors and Actuators,1994,43:107~114
[4] Binning G,Rohrer H.Scanning tunneling microscopy.IBM J Res Develop,1986,30:355~369
[5] Kenny T W,Kaiser W J,Rockstad H K,et al.Wide-bandwidth electromechanical actuators for tunneling displacement transducers.IEEE J Microelectromech Syst,1994,3:97~99

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备注/Memo

备注/Memo:
第一作者:男, 1970年生, 博士研究生.
更新日期/Last Update: 2000-11-20