[1]杨波,周百令.真空封装的硅微陀螺仪[J].东南大学学报(自然科学版),2006,36(5):736-740.[doi:10.3969/j.issn.1001-0505.2006.05.011]
 Yang Bo,Zhou Bailing.Vacuum packaged silicon micromachined gyroscope[J].Journal of Southeast University (Natural Science Edition),2006,36(5):736-740.[doi:10.3969/j.issn.1001-0505.2006.05.011]
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真空封装的硅微陀螺仪()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
36
期数:
2006年第5期
页码:
736-740
栏目:
仪器科学与技术
出版日期:
2006-09-20

文章信息/Info

Title:
Vacuum packaged silicon micromachined gyroscope
作者:
杨波 周百令
东南大学仪器科学与工程系, 南京 210096
Author(s):
Yang Bo Zhou Bailing
Department of Instrument Science and Technology, Southeast University, Nanjing 210096, China
关键词:
硅微陀螺仪 自激驱动 接口线路
Keywords:
silicon micromachined gyroscope self-oscillation-driven interface circuit
分类号:
U666.123
DOI:
10.3969/j.issn.1001-0505.2006.05.011
摘要:
研究了一种硅微陀螺仪,为了提高品质因数,将其封装在15.5 mm×6 mm的真空腔内.采用一种新方式实现了闭环自激驱动,该方式解耦了闭环驱动的相角和增益条件; 优化设计了接口线路,消除了大部分耦合电容; 推导开环检测时传递函数、静态灵敏度、带宽的表达式,并分析其影响因素.实验结果表明:驱动频率在1 h内相对变化量为0.000 22%; 1 h内驱动幅度相对变化量为0.001 5%; 标度因数为12 mV/(°·s-1),线性度为0.075 8%,陀螺输出信号噪声低于31.6 μV/Hz1/2.
Abstract:
Described in this paper is a silicon micromachined gyroscope(SMG)which is packed in a vacuum chamber with the dimension of 15.5 mm×6 mm in order to improve the Q-factors. A new closed-loop drive scheme, which decouples the angle and gain of the self-oscillation-driven, is adopted for the SMG. The interface circuit is optimized to remove most impacts of parasitic capacitances. The expression of transfer function, band width and static sensitivity is deduced in open-loop detection. The experiments show that the relative drift of drive frequency and amplitude in 1 h are 0.000 22% and 0.001 5%in one hour respectively, the scale factor is 12 mV/(°·s-1), the linearity is 0.075 8% and the noise of output signal is below 31.6 μV/Hz1/2.

参考文献/References:

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[5] Chen Yen-Cheng,M’Closkey Robert T.A control and signal processing integrated circuit for the JPL-Boeing micromachined gyroscopes[J].IEEE Transactions on Control Systems Technology,2005,13(2):286-300.
[6] Bae Sam Y,Hayworth Ken J,Yee Karl Y.High performance MEMS micro-gyroscope[C] //Bernard Courtois,Jean Michel Karam,eds.Proceedings of SPIE Design,Test,Integration,and Packaging of MEMS/MOEMS.Cannes,France,2002,4655:316-324.
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[8] 裘安萍.硅微型机械振动陀螺仪结构设计技术研究[D].南京:东南大学仪器科学与工程系,2001.
[9] Yang Bo,Su Yan,Zhou Bailing.A new closed-loop driving circuit of silicon micromachined vibratory gyroscope[J].Transactions of Nanjing University of Aeronautics & Astronautics,2005,22(4):150-154.

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备注/Memo

备注/Memo:
作者简介: 杨波(1979—),男,博士生; 周百令(联系人),男,教授,博士生导师,zhoubailing@seu.edu.cn.
更新日期/Last Update: 2006-09-20