[1]张霖,赵东标,张建明,等.中间尺度零件微细铣削加工工艺[J].东南大学学报(自然科学版),2008,38(4):674-677.[doi:10.3969/j.issn.1001-0505.2008.04.025]
　Zhang Lin,Zhao Dongbiao,Zhang Jianming,et al.Micro milling machining of meso-scale components[J].Journal of Southeast University (Natural Science Edition),2008,38(4):674-677.[doi:10.3969/j.issn.1001-0505.2008.04.025]
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中间尺度零件微细铣削加工工艺()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
38
期数:
2008年第4期
页码:
674-677
栏目:
机械工程
出版日期:
2008-07-20

文章信息/Info

Title:
Micro milling machining of meso-scale components
作者:
张霖1;  赵东标1;  张建明2;  杨志甫2
1 南京航空航天大学机电学院, 南京 210016; 2 北京航空精密机械研究所, 北京 100076
Author(s):
Zhang Lin1;  Zhao Dongbiao1;  Zhang Jianming2;  Yang Zhifu2
1 College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016,China
2 China Precision Engineering Institute for Aircraft Industry, Beijing 100076, China
关键词:
微细加工;  微细铣削;  中间尺度零件;  小型化数控机床
Keywords:
micro manufacturing;  micro milling;  meso-scale components;  miniaturized CNC machine tool
分类号:
TH122;TH161
DOI:
10.3969/j.issn.1001-0505.2008.04.025
摘要:
论述了中间尺度零件微细铣削加工关键使能技术,然后介绍了自行研制的小型精密数控微细铣削系统,其定位精度可达1.53 μm.最后开展机床加工工艺实验研究,采用直径0.2 μm的端铣刀进行平面微细铣削加工,获得表面粗糙度值为215 nm; 采用直径0.2 μm的球头铣刀进行微直槽加工,尺寸误差在1～2 μm以内; 并进行了微螺旋槽、微齿轮及微半球典型结构件的微细铣削加工实验.分析结果表明系统已经具备了对中间尺度三维微小零件的微细铣削加工能力.
Abstract:
The related key enabling technology for the process of micro milling is presented based on theoretical analyses. A developed milling machining system which has a positioning accuracy of 1.53 μm is introduced. Some tests were carried out to evaluate the system precision and performance. The machining tests included a plane with a surface roughness of 215 nm, micro straight slots with a dimension error range of 1 to 2 μm, as well as some typical structures of helix slots, micro gear and micro hemisphere. The analysis results of these tests show that the system is able to fulfill the micro milling machining of 3D meso-scale components.

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相似文献/References:

[1]戴靖东.超大规模集成电路微细加工精密工作台系统的动态响应[J].东南大学学报(自然科学版),1987,17(1):96.[doi:10.3969/j.issn.1001-0505.1987.01.012]
　Dai Jingdong.Dynamic Response of an Accurate Positioning X-Y Stage System for Microfabrication in VLSI[J].Journal of Southeast University (Natural Science Edition),1987,17(4):96.[doi:10.3969/j.issn.1001-0505.1987.01.012]

备注/Memo

备注/Memo:
作者简介: 张霖(1975—),男,博士,讲师,zhanglin05@nuaa.edu.cn.
基金项目: “十一五”航空支撑技术预研基金资助项目(61901090302)、航空科技重点实验室基金资助项目(5146050204HK1302).
引文格式: 张霖,赵东标,张建明,等.中间尺度零件微细铣削加工工艺[J].东南大学学报:自然科学版,2008,38(4):674-677.
更新日期/Last Update: 2008-07-20