[1]肖建斌,廖小平,周易.毫米波MEMS开关自激励机理实验验证结构的模拟与设计[J].东南大学学报(自然科学版),2011,41(5):923-928.[doi:10.3969/j.issn.1001-0505.2011.05.006]
 Xiao Jianbin,Liao Xiaoping,Zhou Yi.Simulation and design of structure for experimental verification of self-actuation of millimeter-wave MEMS switch[J].Journal of Southeast University (Natural Science Edition),2011,41(5):923-928.[doi:10.3969/j.issn.1001-0505.2011.05.006]
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毫米波MEMS开关自激励机理实验验证结构的模拟与设计()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
41
期数:
2011年第5期
页码:
923-928
栏目:
电子科学与工程
出版日期:
2011-09-20

文章信息/Info

Title:
Simulation and design of structure for experimental verification of self-actuation of millimeter-wave MEMS switch
作者:
肖建斌廖小平周易
(东南大学MEMS教育部重点实验室,南京 210096)
Author(s):
Xiao JianbinLiao XiaopingZhou Yi
(Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
关键词:
毫米波MEMS开关自激励实验验证
Keywords:
millimeter-wave MEMS switch self-actuation experimental verification
分类号:
TN602
DOI:
10.3969/j.issn.1001-0505.2011.05.006
摘要:
提出了一种新型的毫米波MEMS开关自激励机理的实验验证结构,该结构由一分四功率分配器和5个相同开关形成的阵列组成.通过CST Microwave Studio和HFSS电磁仿真软件完成了一分四功率分配器和开关阵列的设计.在频率为35GHz时,一分四功率分配器的4个输出端口的隔离度小于-48dB,同时由于结构的对称性,4个输出端口具有等分功率的性质.这2个特性对开关自激励机理的实验验证的功能实现至关重要.设计的毫米波MEMS电容式并联开关在35GHz的插入损耗为0.076dB,隔离度为-55dB; 设计的毫米波MEMS直接接触式串联开关在35GHz具有0.14dB的插入损耗和-25dB隔离度.
Abstract:
A new type of structure for experimental verification of self-actuation of millimeter-wave MEMS switch is presented. The structure, which is designed using electromagnetic simulation software CST Microwave Studio and HFSS, consists of a four-way power divider and an array of five same switches. The input signal is equally divided into four output signals in the four-way power divider due to the structure symmetry, while the isolation between any two output ports is less than -48dB at 35GHz. These two characteristics are important to the realization of the function of the structure. The designed millimeter-wave MEMS capacitive shunt switch has 0. 076dB insertion and -55dB isolation at 35GHz, while the designed millimeter-wave MEMS DC-contact series switch has 0. 14dB insertion and -25dB isolation at that frequency.

参考文献/References:

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备注/Memo

备注/Memo:
作者简介:肖建斌(1983—),男,硕士;廖小平(联系人),男,博士,教授,博士生导师,xpliao@seu.edu.cn.
基金项目:国家自然科学基金资助项目(60976094,61076108,60676043).
引文格式: 肖建斌,廖小平,周易.毫米波MEMS开关自激励机理实验验证结构的模拟与设计[J].东南大学学报:自然科学版,2011,41(5):923-928.[doi:10.3969/j.issn.1001-0505.2011.05.006]
更新日期/Last Update: 2011-09-20