[1]马建,王欣,李堃,等.基于氮化硅薄膜纳米孔制备及DNA分子检测[J].东南大学学报(自然科学版),2017,47(2):265-270.[doi:10.3969/j.issn.1001-0505.2017.02.012]
 Ma Jian,Wang Xing,Li Kun,et al.Fabrication of Si3N4 nanopore for DNA detection[J].Journal of Southeast University (Natural Science Edition),2017,47(2):265-270.[doi:10.3969/j.issn.1001-0505.2017.02.012]
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基于氮化硅薄膜纳米孔制备及DNA分子检测()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
47
期数:
2017年第2期
页码:
265-270
栏目:
机械工程
出版日期:
2017-03-20

文章信息/Info

Title:
Fabrication of Si3N4 nanopore for DNA detection
作者:
马建1王欣1李堃1纪安平12杨浩杰1沙菁1陈云飞1
1东南大学微纳生物医疗器械设计与制造实验室, 南京 211189; 2重庆三峡学院机械工程学院, 重庆 404100
Author(s):
Ma Jian1 Wang Xing1 Li Kun1 Ji Anping12 Yang Haojie1 Sha Jinjie1 Chen Yunfei1
1Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, Southeast University, Nanjing 211189, China
2School of Mechanical Engineering, Chongqing Three Gorges University, Chongqing 404100, China
关键词:
氮化硅 纳米孔 聚焦离子束 DNA
Keywords:
silicon nitride nanopore focused ion beam(FIB) deoxyribonucleic acid(DNA)
分类号:
TH789
DOI:
10.3969/j.issn.1001-0505.2017.02.012
摘要:
通过对影响聚焦离子束溅射氮化硅纳米孔的溅射时间和离子束束流2个主要参数的研究,优化了聚焦离子束溅射纳米孔加工工艺.提出了利用聚焦离子束对氮化硅薄膜进行减薄后再溅射纳米孔的加工工艺.采用该加工工艺不仅可以减小纳米孔的直径和厚度,还可以减小纳米孔的锥度.最后利用氮化硅纳米孔研究了不同孔径的纳米孔对48 kb λ-DNA过孔姿态的影响,结果表明,孔径较大时,DNA分子过孔存在多种过孔姿态,孔径越小,DNA分子越容易被拉直过孔.同时针对DNA过孔时引起的阻塞电流,提出了简易的计算模型.
Abstract:
Main parameters affecting the structure of nanopore during focused ion beam(FIB)sputtering silicon nitride membrane were studied: the sputtering time and the current of ion beam. Based on the optimizated FIB sputtering process, the FIB was used to reduce the thickness of the silicon nitride membrane firstly and then sputter the nanopore. This fabrication process could improve the structure of the nanopore, including the size and the cone of the nanopore. Finally, using the fabricated nanopore, the signature of 48 kb λ-DNA was studied when DNA molecules were translocated through Si3N4 nanopore. The result shows when the nanopore size the smaller, the DNA molecular is easily straight through the nanopore. Meanwhile a simple calculation model for the blocking current caused by DNA translocation is proposed.

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备注/Memo

备注/Memo:
收稿日期: 2016-07-02.
作者简介: 马建(1983—),男,博士,讲师,jian.ma@seu.edu.cn.
基金项目: 国家自然科学基金资助项目(51375089,51375092).
引用本文: 马建,王欣,李堃,等.基于氮化硅薄膜纳米孔制备及DNA分子检测[J].东南大学学报(自然科学版),2017,47(2):265-270. DOI:10.3969/j.issn.1001-0505.2017.02.012.
更新日期/Last Update: 2017-03-20