[1]沙菁,徐伟,徐冰,等.面向生物分子检测的MoS2膜流体场效应管的制备[J].东南大学学报(自然科学版),2017,47(5):913-917.[doi:10.3969/j.issn.1001-0505.2017.05.012]
 Sha Jingjie,Xu Wei,Xu Bing,et al.Fabrication of molybdenum disulfide field-effect transistor for detection of biological molecules[J].Journal of Southeast University (Natural Science Edition),2017,47(5):913-917.[doi:10.3969/j.issn.1001-0505.2017.05.012]
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面向生物分子检测的MoS2膜流体场效应管的制备()
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《东南大学学报(自然科学版)》[ISSN:1001-0505/CN:32-1178/N]

卷:
47
期数:
2017年第5期
页码:
913-917
栏目:
机械工程
出版日期:
2017-09-20

文章信息/Info

Title:
Fabrication of molybdenum disulfide field-effect transistor for detection of biological molecules
作者:
沙菁徐伟徐冰邹益人陈云飞
东南大学机械工程学院, 南京 211189; 东南大学江苏省微纳生物医疗器械设计与制造重点实验室, 南京 211189
Author(s):
Sha Jingjie Xu Wei Xu Bing Zou Yiren Chen Yunfei
School of Mechanical Engineering, Southeast University, Nanjing 211189, China
Jiangsu Key Laboratory for Design and Manufacture of Micro-nano Biomedical Instruments, Southeast University, Nanjing 211189, China
关键词:
二硫化钼 场效应晶体管 背栅电压 转移过程 生物分子检测
Keywords:
molybdenum disulfide(MoS2) field-effect transistor back-gate voltage transfer process biological molecules detection
分类号:
TB43
DOI:
10.3969/j.issn.1001-0505.2017.05.012
摘要:
为提高生物分子检测的灵敏度,通过氮化硅基底的制备、二硫化钼(MoS2)薄膜的铺陈以及金属电极的制备等步骤研制了MoS2流体场效应管.将制备好的场效应管进行电学表征并分别在空气和浸润环境中进行性能测试.实验结果表明:当背栅电压为0 V时,漏极电流与电压呈线性关系,电极与二硫化钼样品之间的接触为欧姆接触;用机械剥离方法制备出的MoS2薄膜为单层;浸润环境下场效应管上二硫化钼的电阻比空气中的小,这是由于浸润环境下样品杂质掺杂浓度提高所致;随着液栅电压的增加,漏极电流与电压的曲线斜率也会随之增加,场效应增强.作为一种新型的二维材料,二硫化钼可以用来制备流体场效应管和提高生物分子检测的灵敏度.
Abstract:
To improve the sensitivity of biological molecules detection, the molybdenum disulfide(MoS2)field-effect transistors(FETs)were fabricated by the following steps: preparation of SiNxx substrate, preparation of MoS2 membrane and deposition of gold electrodes. Fabricated FETs were performed with electrical characterization and tested under both air and wet conditions. The results show that the leakage current is in a linear relationship with the voltage,when the back-gate voltage is zero, indicating that the contact between the electrode and the MoS2 sample is the ohmic contact.The MoS2 membrane is monolayer using mechanically exfoliated methods. The resistance of the transistor under the wet condition is smaller than that in air for the increasing impurity doping concentration of samples under the wet condition. Besides, with the increasing of the liquid-gate voltage, the slope of the Ids-Vds can improve a lot. As a novel two-dimensional material, the MoS2 membrane can be used in the field-effect transistors fabrication to improve the sensitivity of the biological molecules detection.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期: 2017-03-05.
作者简介: 沙菁(1980—),女,博士,副教授,major212@seu.edu.cn.
基金项目: 国家自然科学基金资助项目(51375092,51675101)、中央高校基本科研业务费专项资金资助项目(2242015R30002).
引用本文: 沙菁,徐伟,徐冰,等.面向生物分子检测的MoS2膜流体场效应管的制备[J].东南大学学报(自然科学版),2017,47(5):913-917. DOI:10.3969/j.issn.1001-0505.2017.05.012.
更新日期/Last Update: 2017-09-20